Inline Process Metrology for Laser Structuring Systems

Scan4SurfProject of the European Micro and Nano Technology program

The project is aimed at development of the laser surface structuring system with inline surface scanning system. The main goal of the Czech participants is development of novel high-power broad-band sources, suitable for measurement of surface profile during the laser structuring process.

Duration: May 2010 - December 2012

Laser structuring is a rapidly developing manufacturing technique with long-term technological
impact on future economic and ecological challenges. In a broad spectrum of industrial branches, e.g. aerospace, power engineering, tool- and mould making and automotive, laser structuring is applied to minimize air resistance, reduce operating noise, optimize manufacturing tools and minimize friction losses of innovative products.

The aim of this project is the development and integration of a novel inline-metrology device for laser structuring systems to detect the macro- and microstructure before, during and after the structuring process. This will increase the efficiency significantly and decrease the costs and machining times. To reach a high degree of compatibility, the metrology system is planned as a modular device for mounting to the high-precision scanning units of structuring systems. The measurement beam will use precisely the same optical path as the structuring laser utilizing the scanning unit and telecentric f-theta optics of the laser scanning system. This leads to optimized measurement conditions in the micron range minimizing the misalignment and offset of the beams facilitating fast scanning and in-process measurements. To meet the high expectations of micron resolution, large measurement range and long working distance low-coherence interferometry measurement technology is applied. A major challenge is the objective to utilize the focusing telecentric f-theta optics and scanning unit of the structuring system. This will lead to an adaptation of the scanning unit to broadband light sources. For process optimization, the captured measurement data is fed back in real-time to the central controlling system to readjust the process parameters for achieving optimal, reproducible process results.

List of partners:

  • Fraunhofer IPT,  Germany
  • Precitec Optronik GmbH, Germany (coordinator)
  • SCANLAB AG, Germany
  • ModuleWorks GmbH, Germany
  • Werkzeugbau Siegfried Hofmann GmbH, Germany
  • Safibra s. r. o., Czech Republic      
  • UFE, Czech Republic     
  • IMS s. r. o., Czech Republic

The Scan4surf project was sucessfully concluded. We developed a broadband high power light source for high precision inline netrology surface scanning. The prototype of device will be  presented at Fraunhofer IPT booth during Laser2013 international trade show in Munich.



202225. 4.

Invitation to SENSOR+TEST 2022

Let us invite you to visit us at the international SENSOR+TEST 2022 exhibition, which will take place from 10 to 12 May 2022 in Nuremberg.

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